精选优质文档-倾情为你奉上A number of forms of CVD are in wide use and are frequently referenced in the literature. These processes differ in the means by which chemical reactions are initiated (e.g., activation process) and process conditions. Classified by operating pressure: o Atmospheric pressure CVD (APCVD) CVD processes at atmospheric pressure.o Low-pressure CVD (LPCVD) CVD processes at subatmospheric pressures. Reduced pressures tend to reduce unwanted gas-phase reactions and improve