第六讲 湿法腐蚀/ 刻蚀outline Si -Anisotropic -KOH, TMAH, EPW -Isotropic -HNA SiO2-Glass, PSG -Isotropic -HF, BHF Si3N4 -Isotropic -Boiled H3PO4 ExampleSilicon Etching (Anisotropic) KOH EPW TMAHKOH etching Relationship between etching rate and temperature? Relationship between etching rate and concentration? Selectivity of KOH etching? Whats corner compensation? Etching stop method?KOH etching Relationship between etching rate and temperature? Relationship between etching rate and concentration? Selectivi
