1、Newlvit 04/08/2012 1Wastewater Treatment System of CISEMICISEMI废水处理系统 1期简介Newlvit 04/08/2012 2Contentu Waste Water System Waste Codes in China Wastewater Effluent Standard Waste Classification Waste Definition Wastewater System Flow Waste Chemical Collection Chemical Dosing SystemWaste Tank Material
2、 & List Waste Photoresist Lifting station Layout Waste Water Lifting Station Wastewater Treatment LayoutNewlvit 04/08/2012 3Waste Codes in Chinau中华人民共和国水污染防治法 (水 ) 中华人民共和国国家标准 地面水环境质量标准 中华人民共和国国家标准 地下水环境质量标准 污水综合排放标准 GB 8978-2002之第三级标准其中氨氮实行二级标准 污水处理设施环境保护监督管理办法 污水排入城市下水道水质标准 Newlvit 04/08/2012 4Was
3、te Codes in Chinau国家危险废物名录HW06有机溶剂废物：废催化剂； 清洗剥离物、反应残渣及滤 物与载体废物感光材料废物：废显影液定影液、正负胶片、相纸及药品表面处理废物：废电镀溶液、镀槽淤渣、电镀水处理污泥、处理酸碱渣、氧化槽渣、磷化渣 HW22含铜废物HW24含砷废物HW31含铅废物HW32无机氟化物废物：氢氟酸 不包括氟化钙 HW34废酸：废硫酸、硝酸、 磷酸 HW35废碱： NaOH、 KOHHW42废有机计溶剂：异丙醇、丙酮、环戊酮、二甲苯 Newlvit 04/08/2012 5Wastewater Effluent Standard项 目 单 位 验 收 标 准
4、三 级标 准 备 注pH 69 6-9COD ppm 350 500SS ppm 250 400F- ppm 15 20NH4-N ppm 25 按二 级标 准 25其他水质项目亦须符合 GB 8978-2002 污水综合排放标准之第三级标准。Newlvit 04/08/2012 6Waste ClassificationWastewaterFrom FabDr-RECDr-DHFGeneral Acid/CausticWastewaterDr-GWDr-HPMDr-APMFluorideWastewaterDr-MHFDr-HHFDr-CMP-MDr-CMP-OAcidWastewaterD
5、r-H2SO4Dr-H3PO4SolventWastewaterDr-Sol.Dr-IPAPhoto ResistWastewaterDr-PR-PDr-FLDr-ESDr-H2SO4+HFDr-CMP-IDr-L/SDr-PR-NReclaimWastewaterCMPWastewaterDr-CMP-PNewlvit 04/08/2012 7Waste ClassificationDI Water PlantDr-CAREGDr-MGREGHVAC ChemicalRoomDr-C/SDr-CTBWDr-GWDr-MHFDr-H2SO4Dr-Sol.Dr-HPMDr-H3PO4To FWW
6、To GWWTo GWWTo GWWWastewaterFrom FacilityNewlvit 04/08/2012 8Drainage Classification For Chemical RoomGroup Name Room Name Equipment Water Drain RemarkDI/CW DRG/C HCl room HCl CDS DI DR-HPM Acid room-1 1%HF CDS DI DR-MHF 49%HF CDSPoly(I) CDSPoly(II) CDSH3PO4 CDS DR-H3PO4HNO3 CDS DR-GW/MHFAcid room-2
7、 BHF7:1 CDS DI DR-MHF BHF40:1 CDSBHF400:1 CDSCaustic room Dev#1 CDS DI DR-GW Dev#2 CDS29%NH4OH CDS0.5%NH4OH CDSNewlvit 04/08/2012 9Group Name Room Name Equipment Water Drain RemarkDI/CW DRSolvent room IPA CDS NA DR-Sol 防爆IPA storage tankRinse#1 CDSRinse#1 storage tankACT-935 CDSEG CDSDev#3 CDSH2SO4
8、room H2SO4 CDS DI DR-H2SO4 H2SO4 storage tankH2O2 room H2O2 CDS DI DR-GW H2O2 storage tankDev storage roomDev#1 storage tank DI DR-GW Dev#1 storage tankDrainage Classification For Chemical RoomNewlvit 04/08/2012 10Waste Definitionu Definition of liquid waste in wastewater treatment - 1 Dr-GW, Dr-HPM
9、 & Dr-APM (General Waste)Quick Dump Rinse step of chemical bath drain (APM, HPM, SPM excluding for HF), Others (Including SO4-2, PO4-3 & Organic Solvent), Resistance 2M-cm. Dr-FLFloor drain. Dr-ESEmergency shower. Dr-HHF49%, Fluoride contain chemical drain. Dr-MHFLess than 49%, Fluoride contain chemical drain. Dr-DHFQuick Dump Rinse Fluoride contain chemical drain. Dr-CMP-M Contain Metal slurry of CMP & wafer scrubber drain. Dr-CMP-OContain Oxide slurry of CMP & wafer scrubber drain.
