光刻工艺步骤介绍光刻工艺步骤介绍 1A综述一光刻工艺流程介绍 1 涂胶工艺介绍 2 曝光工艺介绍 3 显影工艺介绍 4 显检图形介绍 5 条宽&套刻测量 二在线流片相关知识介绍 2A光刻工艺流程涂胶曝光显影套刻测量 条宽测量送刻蚀送注入显检3A N-Well PR CoatingN-Well PR CoatingN-SiSi(P)Si3N4SiO2PR光刻工艺光刻工艺步骤步骤实例实例-N-WELLN-WELLN-WELLN-WELL层次涂胶层次涂胶层次涂胶层次涂胶4A N-Well ExposureN-Well ExposureN-SiSi(P)Si3N4SiO2PR光刻工艺光刻工艺步骤步骤实例实例-N-WELLN-WELLN-WELLN-WELL层曝光层曝光层曝光层曝光5A N-Well DevelopingN-Well DevelopingN-SiSi(P)Si3N4SiO2PR光刻工艺光刻工艺步骤步骤实例实例-N-WELLN-WELLN-WELLN-WELL层次显影层次显影层次显影层次显影6A N-Well EtchingN-Well EtchingN-SiSi(P)Si3N4
