1、PVD2010-05-25 14:22:46| PVD| PVD TiCNTiN- 1PVD PVDPVDPVDPVDPVD 2 PVDPVDPVDBalzersTiNTiCN30 3- PVDPVD 4 PVD 5 50% 6 80%CVDPVD MoS2TiNTiAlNTiAlCNTiNAlNTiNPVD PVD 1 PVDPVD-TiN 2 - 3 -PVDPVDPVDTiNPVDPVDPVDTiN-TiCN-TiNPVD PVD Cathode Arc Deposition TiAlN Hot Cathode Plating BalzersTiN Magnetron Sputter P
2、lating TiAlN200040GPa-c-BNKoehlerM1M 2EM1EM2-M1M1/M2M2-Koehler1/TiN/VN56GPaTiN/VNbN41GPaTiN/NbN51GPaTiN/SiN80105 GPa2/TiN/CNX4555GPaZrN/CNX4045GPa3/TiC/VC52GPaTiC/NbC4555GPaWC/TiC40GPa4/TiN/Nb52GPaTiAlN/Mo51GPa5/TiAlN/Al2O36/TiB/TiNTiB/TiC5070GPa7/2000C3N4/TiNTiN/NbN TaN/NbNTiN/Al2O3TiN/Si3N4TiN/AlNTiN/TiB2TiN/SiO2TIN/SiCAlN/VN Si3N4/CrNPVDAlN/Ti,AlN10nm29GPa1.3nm 377.8GPa-10nmVeprekKoehlerTi-Si-Nnc-TiN/-Si3N4105GPaPCVDPVD1100m/minTiNPVD2000100100050m/min2TiAlN TiNTiAlN100%200% TiAlNTiN - -3-4-PVDPVDTiCNTiN-1PVDPVDPVDPVDPVDPVD2PVDPVD
