1、先进表面工程技术,目的,提高耐磨性提高耐腐蚀性提高疲劳性能提高表面其它性能装饰性功能性,表面工程技术分类,利用材料自身性质形变强化相变强化表面涂层技术热喷涂电化学处理：电镀，化学镀，化学转化膜技术气相沉积技术表面合金化技术化学热处理技术激光表面合金化技术离子注入合金化技术复合表面改性技术,主要内容,表面涂层技术电子束表面技术激光束表面技术离子束表面技术,涂层技术（coatings）,1 The concept of coatings,Isolating the organism from the environmentProviding contact between the organism
2、 and the environmentSkin1950s:A layer of material formed naturally or synthetically or deposited artificially on the surface of an object made of another material,with the aim of obtaining required technical or decorative properties.,2. Structure of the coating,Single layer coatingSingle constituent
3、 coatings(单组成涂层Cr, TiN)Multi-component coatings(多组元涂层TiAlN)Multiple coatingSandwich coating (夹层Ni-Cr-Ni-Cr)Self-stratifying paint(自成层涂料，有底层和顶层之分)Thickness: hundredths of a micrometer to several millimeters,Types of coatings,Division of coatings by materialsMetallic coatingsZn,Ni,Al,Cu.(金属)Pb-Sn-Cu,S
4、n-Ni, W,Co, Ni-Cr-Al-Y（合金）Non-metallic coatingsPaints(涂料)Varnishes（清漆）Resins（树脂）Waxes（打腊）Lubricants（润滑剂） Vitreous enamels（搪瓷、珐琅）Metal ceramics（金属陶瓷）Ceramic materials（陶瓷材料）,Types of coatings,Classification of coatings by applicationProtective coatings(防腐，厚)Decorative coatings（装潢，薄）Protective-decorati
5、ve coatings（防腐兼装潢）Technical coatings(物理、机械、电学和热学性能),Types of coatings,Classification of coatings by manufacturing methodsGalvanizing(电镀和化学镀)Immersion coatings （浸镀）Spray coatings (喷涂)Cladded coatings (覆层)Crystallizing coatings(结晶沉积),Potential properties of coatings,Geometrical parameters of coatingsT
6、hicknessRoughnessUnevennessDefects,Glow discharge methods and CVD technology,NitridingCarburizingCarbonitridingSulfonitridingBoridingSilicidingPlasma assisted chemical vapour deposition,Glow discharge,Ion sputtering,Glow discharge furnace,Glow discharge application,Glow discharge nitridingGlow disch
7、arge boriding,CVD methods,Vacuum deposition by physical techniques (PVD),Classification of PVD techniques,Thermal evaporation(热蒸镀)Sputtering(溅射)Ion plating(离子镀),Discussion of more important PVD techniques,Techniques utilizing simultaneous evaporation of substrate from entire liquid surface,Activate
8、reactive evaporationBias activated reactive evaporationThermo-ionic arc evaporationHot hollow cathode dischargeIonized cluster beam deposition,Techniques utilizing local evaporation,Arc evaporationCathode spot arc evaporationPulse plasma methodLaser beam evaporation,Technique utilizing direct sputte
9、ring,Diode sputteringTriode sputteringHollow cathode sputteringElectron cyclotron resonance sputteringIon sputteringMagnetron sputtering,Technique utilizing deposition from ion beams,Ion beam depositionIon mixing,Equipment for coating deposition by PVD techniques,Vacuum chamberDeposition headsSystem
10、s for formation and sustaining of vacuumSystems for supply of reactive gasesElectrical and magnetic systemsAuxiliary components(heating)Systems for fixturing and displacement of the loadControl system,Coatings deposited by PVD techniques,Coating materialsMetallicCovalentIon or heteropolar, electrova
11、lent, polar(极性),Type of coatings,Control of structure and properties of coatings,Models of coating deposition,Tribological properties,Anti-corrosion properties,2.电子束表面技术,2.1电子束表面快速加热技术,2.2电子束表面合金化技术,2.3电子束表面技术的应用,3.激光表面合金化,激光表面加热技术的应用,4.离子注入表面改性技术,离子注入原理,注入离子的能量损失,射程分布,表面溅射,辐照损伤,辐照损伤,离子注入模型,离子注入表面改性
12、机理,辐照损伤，形成大量缺陷弥散强化，形成化合物质点喷丸作用，离子轰击表面压缩，单位体积内原子数目增加,表面形成非晶态降低摩擦系数提高表面强度，提高耐磨性 提高疲劳性能 提高表面耐腐蚀性,等离子体基离子注入,Ion sheath evolution,HV,V0,0,How does the sheath evolve and the plasma replenish inside a pipe?,Process of ion sheath evolution model,Plasma refill after pulse,Development of Plasma-based Ion Impl
13、antation Techniques in China,Plasma based ion implantation in China,Harbin / R2,Beijing / R2,Dalian / R1,Shanghai / R3,Chengdu / R2,Shenzhen / C1,Hongkong / R1,7 Cities / 12 GroupsR ResearchC Company,Typical Facilities,Plasma Source,Schematic diagram of the microwave ECR PBII apparatus,Schematic dia
14、gram of the RF and filaments PBII apparatus,Plasma Density,Plasma Density,Gaseous elements implanted by PBII,The TEM of AlN precipitates of 2014 aluminum alloys sample implanted with nitrogen,Variation in relative wear resistance with nitrogen ions dose,The depth profile of nitrogen in the ion impla
15、nted layer,Gaseous elements implanted by PBII,The nitrogen concentration, surface hardness and wear resistance of Ti6Al4V implanted with nitrogen by PBII,60kV, 120min,60kV, 90min,30kV, 90min,0.03m/s,0.06m/s,Inner surface implantation,With anode,Without anode,Metal plasma-based ion implantation (MePB
16、II),The schematic drawing of UBM MePBII,The profiles of Cu in surface layer,Metal plasma-based ion implantation (MePBII),Oscilloscope traces of (a) arc current, and (b) implantation voltage pulse and implantation current during MePBII,The schematic drawing of MEVVA MePBII,Metal plasma-based ion impl
17、antation (MePBII),Coefficient of friction curves of the 9Cr18 samples,AES depth profile of 9Cr18 implanted with Ti and N,Plasma-based Ion Implantation and Deposition (PBII&D),Elements concentration distribution in the mixed layer measured by XPS,Binding energy of C1s at different etching time in the
18、 mixed layer by XPS,Glancing angle X-ray diffraction spectrum of 10 periods mixed film,Relationship between load and microhardness of the mixed layer,Plasma-based Ion Implantation and Deposition (PBII&D),The XRD pattern of the composite coating,Al2 O3,AlN,Al,-Fe,The Tafel curves of (a) Sample with t
19、he AlN, Al2O3 and Al composite coating; (b) Sample without the composite coating,Schematic illustration of PBII&D set-up,Plasma-based Ion Implantation and Deposition (PBII&D),Elevated temperature PBII,The microstructure of elevated temperature implantation with nitrogen on the ion substrate（35kV）,30
20、0,330,390,GXRD spectra of iron surface layer implanted with nitrogen ions at 15kV, 360C,The effect of the implantation voltage on the microstructure of the nitrided layers,15kV,45kV,25kV,35kV,The surface morphology of implanted surface,15kV,45kV,Elevated temperature PBII,Ra，m,Implanted temperature，,
21、35kV, 360,45kV, 360,35kV, 390,Implanted voltage，kV,Ra，m,Elevated temperature PBII,Concentration, hardness, wear resistance and corrosion resistance of the elevated temperature PBII surface,Elevated temperature PBII,Phase component, microhardness, modulus and wear resistance analysis of 2024 aluminum
22、 alloyimplanted with nitrogen ions at different implantation temperatures,Elevated temperature PBII,Anodic polarization curves in 0.5 mol/l H2SO4 for the TiN fillms deposited on M2 high speed steel using various implanted nitrogen ion energies,DLC and gradient coatings,Configuration, concentration d
23、istribution and critical load of DLC-TiC-Steel gradient coating on bearing steel,DLC and gradient coatings,TEM image,100 nm,4 nm,图58 TiC层HRTEM像,DLC and gradient coatings,Hardness,Friction coefficient,Surface morphology of the wear track,Turns,DLC and gradient coatings,Concentration, friction and wear surface morphology of untreated and W PBII + DLC film of 9Cr18 sample,Untreated,W PBII + DLC,Applications,Applications,
