材料表面微细加工技术综述摘要: 详细阐述了微加工工艺以及近几年内国际上开发的一些新的加工技术，如电化学微加工，微细电火花加工，电解加工等,重点提及微细电火花加工技术，并提出了目前这些方法中存在的缺陷及解决方法。关键词微细加工技术; 微细电火花加工Abstract: Silicon micro-processing technology and other micro-processing technologies developed in recent years, such as micro-chemical micromachining, micro-EDM, electro-machining and so on, and main describe the technology of micro-EDM,Finally some disadvantages about those technologies were put forward.Key words: micro-processing technology, micro-EDM.1.引言
