,ASMLScannerGeneralIntroduction,CourseOverview,SystemOverviewBasicOperationRecovery,PAS5500WAFERSCANNEROVERVIEWPurposeThePAS5500isafullyautomaticstep-and-repeatcameraforexposingwafersusedformanufacturingofintegratedcircuits.Thesystemformspartofalithographicprocess,andissuitableforbatchproductionoflargeandverylargescaleintegratedcircuits.,SystemOverview,ThePAS5500waferscannercomprisesthefollowingmainunits:Exposureunit,Wafertransportsystem,Operatorconsole,Electronicscabinet,ContaminationandTemper
