MATERIAL ETCHAluminum (Al) - anisotropicGAS USEDCl2 + BCl3Aluminum (Al) - isotropicCl2 + BCl3Aluminum Gallium Arsenide (AlGaAs)Aluminum Nitride (AlN)SiCl4 + BCl3 + ArCl2 + BCl3Black DiamondBPSGCF4CHF3/ (02 or Ar)Carbon (C)O2 + ArgonChrome (Cr)Cl2 + O2Chrome (Cr)Cl2 + O2Copper (Cu)BCl3 + Cl2(heat)EpoxyO2 + %5 CF4Gallium Antimonide (GaSb)Ar + Cl2 (5:1)Gallium Arsenide (GaAs) - thinningGallium Arsenide (GaAs)- profileCl2 + BCl3 (isotropic)
