干法腐蚀工艺培训讲义.doc

.干法腐蚀工艺培训讲义目录第一章基本概念第二章干法腐蚀基本原理第三章常用材料的等离子体腐蚀原理与工艺第四章在线干法腐蚀设备结构/ 原理简介第五章干法腐蚀工艺中的终点检测第六章干法去胶第七章在线腐蚀工艺中常见异常及处理方法.第一章基本概念1. WHAT IS ETCHE？DA processforremovingmaterialina specifiedareathrough chemical reaction and/or physical bombardment.2. WHAT WE ETCHED?1) Dielectric (oxide,nitride,etc.)2) Silicide (polysilicon and silicide)3) Silicon(single crystal silicon)4) Metal(AL.Cu.Si)