气相沉积技术研究现状及应用任 强，吴玉萍（河海大学，南京）摘要:本文主要阐述了气相沉积技术的研究现状，介绍了化学气相沉积技术和物理气相沉积技术，分析并展望了其未来的发展趋势。关键词：材料表面工程；气相沉积；薄膜技术；The Recent Research andApplication of Vapor Deposition TechnologyREN Qiang,Wu Yuping(College of Mechanical and Eletronic Engineering ,Hohai University,Nanjing,China)Abstract:Thisarticlemainlyexpoundstheresearchstatusquoofvapordepositiontechnology,introducesthechemicalvapordepositiontechnologyandphysicalvapordepositiontechnology,analysesandprospec
