纳米加工中的LIGA技术Nano machining technology LIGA09机Y4 顾力欢 09120408摘要：在本文中，主要阐述了纳米级加工技术中的LIGA技术，介绍了LIGA技术的发展以及内容，以及各国在LIGA技术领域的发展成果，最后介绍了LIGA技术的延伸准LIGA技术和LIGA技术的应用实例。这些应用的实例告诉了我们LIGA技术的实用性和多样性。Abstract:In this paper, mainly expounds the nano machining technology in LIGA technology, introduces the development of LIGA technology and content, as well as countries in the field of LIGA technology development results, finally introduces the LIGA Technology Extension - quasi LIGA technolo
