1、高溫超導微波元件設計Design of high temperature superconductivity microwave devices,學 生：施冠州 指導教授：孫允武博士,2,大綱,一、簡介二、元件設計三、實驗方法、結果與討論四、結論,3,超導基本特性簡介,所謂超導體必須具備兩個特性：電阻為零、完全反磁性。,4,影響超導性的三種主要因素：溫度、磁場、電流,5,高溫超導微波元件設計,一、故障電流限流器 (fault current limiters， FCL)二、溝槽線圓共振器 (slotline ring resonator),6,何謂超導故障電流限流器,通路上串聯一超導限流元件，
2、當輸出有狀況發生，例如短路，電源可能輸出一過大的電流，只要通過超導限流元件的電流超過超導的臨界電流(Jc)時，使超導體從零電阻的超導態轉變為高阻抗的正常態，來抑制電流，保護系統。,7,故障電流限流器電路示意圖,8,高溫超導限流器使用材枓種類,薄膜。塊材。,9,高溫超導型限流器大致可分為三種：,(1)電阻式故障電流限流器。(2)感應型故障電流限流器。(3)屏蔽式故障電流限流器。,10,高頻系統高溫超導限流器的設計,設計目標：16KV 150A頻率響應：1 GHz阻抗匹配：50 ohm測試超導相變切換時間,11,基板材料考量,基板,YBCO Film,導熱方向,液態氮,液態氮,thermal bo
3、undary resistance,12,各種基板導熱比較,13,YBCO薄膜與不同基板間的thermal boundary resistance,14,元件結構及尺寸的考量,15,50歐姆 共平面波導設計不同線寬(w)可調整不同的臨界電流(critical current),基板：MgO厚度：500m介電係數：9.6ybco膜厚：0.7m阻抗匹配：50頻率響應：1GHz臨界電流密度：5106A/cm2,16,meandering 共平面波導限流元件設計圖樣,17,不同大小的電流脈衝超導電阻變化與時間的關係,電流脈衝寬度：ms,18,薄膜的臨界電流密度與超導相變切換時間的關係,19,不同的ga
4、p的寬度對應液態氮的崩潰電壓,20,不同倍率的電流脈衝下的ybco膜電阻係數與溫度的關係,電流脈衝寬度：s,21,阻抗匹配50歐姆不同長度的共平面波導限流元件,基板：MgO厚度：500m介電係數：9.6ybco膜厚：0.45m阻抗匹配：50頻率響應：1GHz臨界電流密度：5106A/cm2I = 2Ic,22,長度為78mm CPW限流元件光罩(substrate 25mm*25mm),23,長度為135mmCPW限流元件光罩(substrate 25mm*25mm),24,長度為180mmCPW限流元件光罩(substrate 25mm*25mm),25,樣品介紹,本次實驗很感謝大葉大學王立
5、民教授提供ybco膜。ybco膜分別長在兩種不同的基板MgO、LaAlO3。 長膜的方式：濺鍍機。,26,樣品製作,樣品之製作過程分兩部份：1.膜圖案(1)樣品清潔 (2)光微影製程(Photolithography process)(3)蝕刻(etching) (4)去光阻2.接觸金屬(1) 光微影製程(Photolithography process)(2) 熱蒸鍍金屬材料(Metal deposition)(3)光阻舉離(lift-off)。,27,樣品曝光顯影後照片,28,蝕刻( etching ),蝕刻液的調配如下：H3PO4: H2O = 1:100 蝕刻速率：150nm/m,29
6、,限流器成品圖 (尺寸 25mm*25mm),30,限流器量測示意圖,31,ybco膜電阻對溫度的變化量測示意圖,32,ybco膜電阻對溫度的變化,33,Slotline ring resonator 設計,本研究的目標：設計共振頻率(f)為10GHz共振器，選擇LaAlO3做基板，厚度(h)為500m、介電係數(r)是24，基板上鍍有YBCO膜，厚度是450nm。,34,slotline ring resonator結構圖,35,Slotline ring resonator 共振頻率由下列方程式決定,2R ng (2.1),R表示圓形溝槽線的平均半徑g表示溝槽線傳播波長表示波的模數(=1,
7、2,3,4),36,將方程式(2.1)推導後，可以得到slotline ring平均半徑與共振頻率的關係如下：,c 光速 f 共振頻率,有效介電常數,37,設計步驟,(1)確定substrate的厚度h及介電係數r。(2)鍍膜厚度。(3)決定共振頻率 f (Hz)。(4)訊號耦合方式(cpw,slot,microstrip)(5)選擇元件阻抗值(50)條件(1)(5)確定後，可利用經驗公式或電腦模擬程式Harmonica算出元件線寬，再將線寬條件代入經驗公式，即可算出eff(effcetive dielectric constant)，這樣我們就可以很容易地算出slotline ring平均半
8、徑。,38,slotline ring resonator光罩圖形(基板尺寸6mm*6mm),基板: LaAlO3厚度=500m 介電係數=24 ybco膜厚度=450nm G=370m R=1611m gap=180m W=100m,39,共振器成品圖(尺寸 6mm*6mm),40,樣品打線及封裝,41,量測線路示意圖,42,共振頻率和介入損失(insertion loss),共振頻率為5.3GHz 77K時3dB頻寬BW=220MHzQ值是24常溫時3dB頻寬BW=940 MHzQ值是5.6。,43,討論,我們必須再確認設計方法是否有誤。找出三篇已發表的電子期刊內容描述的共振器尺寸，來檢查
9、設計結果的正確性。,與三個實際範例與設計的結果比較，誤差不超過2.5，表示設計出來的參數與實際的結果並沒有相差太多。,44,結論,一、因為薄膜樣品有限，而且表面有很多氧化銅，在設計光罩時，為了避開超導膜上的氧化銅，必須要多設計幾種不同的光罩圖案，使得氧化銅不會影響元件的功能 。二、蝕刻的過程中，蝕刻的方式必須做調整；蝕刻的方式，可以改為先用稀磷酸，蝕刻掉大部分的圖案，再利用離子蝕刻機將剩下的部份吃掉，因為它是非等向性蝕刻，這樣訊號導線的線寬就不會受影響。,45,三、在量測過程中，經常使用烙鐵銲接樣品上的接點，容易使得高溫超導膜基板裂開，建議在一般超導特性量測時，使用低溫快乾銀膠，對樣品傷害減到
10、最小。測量大功率時，必須用壓接的方式，就是將量測線壓銦再壓在樣品金屬接點上。 四、薄膜上氧化銅並不是導體，使得元件製作及特性受到影響。,46,參考資料,1 Giese, R.F.; Runde, M., Assessment study of superconducting fault-current limiters operating at 77 K, Power Delivery, IEEE Transactions on , Volume: 8 Issue: 3 , Jul 1993.2陳永平，高溫超導型故障電流限流器，工業材枓105期，P8496，84年9月。3 Ma, Z.; Su
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